Low-temperature, nontoxic water-induced high-k zirconium oxide dielectrics for low-voltage, high-performance oxide thin-film transistors

Title
Low-temperature, nontoxic water-induced high-k zirconium oxide dielectrics for low-voltage, high-performance oxide thin-film transistors
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 4, Issue 45, Pages 10715-10721
Publisher
Royal Society of Chemistry (RSC)
Online
2016-10-21
DOI
10.1039/c6tc02607a

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