Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride

Effect of Reaction Mechanism on Precursor Exposure Time in Atomic Layer Deposition of Silicon Oxide and Silicon Nitride

(2014) Ciaran A. Murray et al.   ACS Applied Materials & Interfaces

Improvement of $V_{\rm th}$ Instability in Normally-Off GaN MIS-HEMTs Employing ${\rm PEALD}\hbox{-}{\rm SiN}_{\rm x}$ as an Interfacial Layer

(2014) Woojin Choi et al.   IEEE ELECTRON DEVICE LETTERS

Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH3

(2014) Liang Huang et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Architectured van der Waals epitaxy of ZnO nanostructures on hexagonal BN

(2014) Hongseok Oh et al.   NPG Asia Materials

High-performance H2S detection by redox reactions in semiconducting carbon nanotube-based devices

(2013) Hyun Young Jung et al.   ANALYST

Molecular adsorption study of nicotine and caffeine on single-walled carbon nanotubes from first principles

(2013) Hyung-June Lee et al.   CHEMICAL PHYSICS LETTERS

Linear and Hexagonal Porous Structures of an Organic Charge Acceptor Hexaaza-triphenylene-hexacarbonitrile on Au(111) with CN···CN Dipolar Interactions

(2013) Sang-Yeon Won et al.   Journal of Physical Chemistry C

Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration

(2013) Dina H. Triyoso et al.   ECS Journal of Solid State Science and Technology

Binding properties of a nitrogen atom onto an anionic golden fullerene

(2012) Gunn Kim et al.   CHEMICAL PHYSICS LETTERS

Density functional theory study of the structural and electronic properties of amorphous silicon nitrides: Si3N4−x:H

(2012) L. E. Hintzsche et al.   PHYSICAL REVIEW B

Effect of topological disorder on structural, mechanical, and electronic properties of amorphous silicon nitride: An atomistic study

(2012) Ravi Pramod Vedula et al.   PHYSICAL REVIEW B

Deposition and characterization of low temperature silicon nitride films deposited by inductively coupled plasma CVD

(2011) Abhijeet Kshirsagar et al.   APPLIED SURFACE SCIENCE

Effect of ammonia (NH3) plasma treatment on silicon nitride (SiNx) gate dielectric for organic thin film transistor with soluble organic semiconductor

(2011) DongWoo Kim et al.   CURRENT APPLIED PHYSICS

Plasma enhanced atomic layer deposition of SiNx:H and SiO2

(2011) Sean W. King   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Microscopic modeling of the dielectric properties of silicon nitride

(2011) T. Anh Pham et al.   PHYSICAL REVIEW B

Native defects in hexagonalβ-Si3N4studied using density functional theory calculations

(2011) Maria-Elena Grillo et al.   PHYSICAL REVIEW B

Experimental study of the effect of process parameters on plasma-enhanced chemical vapour deposition of silicon nitride film

(2011) A. El Amrani et al.   VACUUM

Hydrogen Adsorption on sp$^2$-Bonded Carbon Structures: Ab-initio Study

(2010) Young-Kyun Kwon   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Atomistic models of hydrogenated amorphous silicon nitride from first principles

(2010) K. Jarolimek et al.   PHYSICAL REVIEW B

Adsorption of water monomer and clusters on platinum(111) terrace and related steps and kinks

(2010) Líney Árnadóttir et al.   SURFACE SCIENCE

Ethylene oxides as hydrogen storage material with pockets in the electronic binding energy distribution

(2009) Sungjong Woo et al.   PHYSICAL REVIEW B

Azobenzene at coinage metal surfaces: Role of dispersive van der Waals interactions

(2009) Erik R. McNellis et al.   PHYSICAL REVIEW B

Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3

(2009) Kwangchol Park et al.   THIN SOLID FILMS

Improvement of Thermal Stability of Magnetoresistive Random Access Memory Device with SiN Protective Film Deposited by High-Density Plasma Chemical Vapor Deposition

(2008) Katsumi Suemitsu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS