Effect of ammonia (NH3) plasma treatment on silicon nitride (SiNx) gate dielectric for organic thin film transistor with soluble organic semiconductor

Title
Effect of ammonia (NH3) plasma treatment on silicon nitride (SiNx) gate dielectric for organic thin film transistor with soluble organic semiconductor
Authors
Keywords
-
Journal
CURRENT APPLIED PHYSICS
Volume 11, Issue 5, Pages S67-S72
Publisher
Elsevier BV
Online
2011-06-05
DOI
10.1016/j.cap.2011.05.021

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