Preparation of highlyc-axis oriented AlN thin films on Hastelloy tapes with Y2O3buffer layer for flexible SAW sensor applications

Growth of c-axis oriented AlN thin films on titanium alloy substrate by middle frequency magnetron sputtering

(2015) Jianying Jiang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

High-Temperature Piezoelectric Sensing

(2013) Xiaoning Jiang et al.   SENSORS

Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

(2013) Hao Jin et al.   Scientific Reports

High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates

(2013) X. L. He et al.   Journal of Materials Chemistry C

Solution deposition planarization of long-length flexible substrates

(2011) Chris Sheehan et al.   APPLIED PHYSICS LETTERS

Wireless Calibration of a Surface Acoustic Wave Resonator as a Strain Sensor

(2010) Brian Donohoe et al.   IEEE SENSORS JOURNAL

Piezoelectric Coefficient Measurement of AlN Thin Films at the Nanometer Scale using Piezoresponse Force Microscopy

(2010) Hyunchang Shin et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

Effect of substrate roughness on c-oriented AlN thin films

(2009) Alvaro Artieda et al.   JOURNAL OF APPLIED PHYSICS