Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy

Published 2012 View Full Article

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Title
Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 526, Issue -, Pages 103-109
Publisher
Elsevier BV
Online
2012-03-05
DOI
10.1016/j.jallcom.2012.02.111

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