Growth of c-axis oriented AlN thin films on titanium alloy substrate by middle frequency magnetron sputtering

Published 2015 View Full Article

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Title
Growth of c-axis oriented AlN thin films on titanium alloy substrate by middle frequency magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 4, Pages 041509
Publisher
American Vacuum Society
Online
2015-06-11
DOI
10.1116/1.4922341

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