Effect of Al substrate nitridation on the properties of AlN films grown by pulsed laser deposition and its mechanism

Published 2015 View Full Article

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Title
Effect of Al substrate nitridation on the properties of AlN films grown by pulsed laser deposition and its mechanism
Authors
Keywords
AlN films, Al substrates, Pulsed laser deposition, Nitridation, Growth mechanism
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 644, Issue -, Pages 444-449
Publisher
Elsevier BV
Online
2015-05-12
DOI
10.1016/j.jallcom.2015.05.032

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