Investigation of the Hydrophilic nature and surface energy changes of HfO2 thin films prepared by atomic layer deposition

Intrinsic Defect Limit to the Growth of Orthorhombic HfO 2 and (Hf,Zr)O 2 with Strong Ferroelectricity: First‐Principles Insights

(2021) Jinchen Wei et al.   ADVANCED FUNCTIONAL MATERIALS

Surface Zeta Potential of ALD-Grown Metal-Oxide Films

(2021) Zijing Xia et al.   LANGMUIR

Surface Energy Change of Atomic-Scale Metal Oxide Thin Films by Phase Transformation

(2020) Il-Kwon Oh et al.   ACS Nano

Towards reliable X-ray photoelectron spectroscopy: Sputter-damage effects in transition metal borides, carbides, nitrides, and oxides

(2020) G. Greczynski et al.   APPLIED SURFACE SCIENCE

Characterization of HfO2 Optical Coatings Deposited by MF Magnetron Sputtering

(2019) Artur Wiatrowski et al.   Coatings

Investigation of the Hydrophobic Nature of Metal Oxide Surfaces Created by Atomic Layer Deposition

(2019) Jongyoon Bae et al.   LANGMUIR

X-ray photoelectron spectroscopy: towards reliable binding energy referencing

(2019) G. Greczynski et al.   PROGRESS IN MATERIALS SCIENCE

Ultra-thin hafnium oxide coatings grown by atomic layer deposition: hydrophobicity/hydrophilicity over time

(2019) R J Martín-Palma et al.   Materials Research Express

Reliable determination of chemical state in x-ray photoelectron spectroscopy based on sample-work-function referencing to adventitious carbon: Resolving the myth of apparent constant binding energy of the C 1s peak

(2018) G. Greczynski et al.   APPLIED SURFACE SCIENCE

Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition

(2018) Yu. M. Chesnokov et al.   JOURNAL OF MATERIALS SCIENCE

Investigation of HfO2 Thin Films on Si by X-ray Photoelectron Spectroscopy, Rutherford Backscattering, Grazing Incidence X-ray Diffraction and Variable Angle Spectroscopic Ellipsometry

(2018) Xuguang Luo et al.   Crystals

Crude-Oil-Repellent Membranes by Atomic Layer Deposition: Oxide Interface Engineering

(2018) Hao-Cheng Yang et al.   ACS Nano

Crystallographic orientation–surface energy–wetting property relationships of rare earth oxides

(2018) Jason Tam et al.   Journal of Materials Chemistry A

Thickness dependent wetting properties and surface free energy of HfO2 thin films

(2016) Sergei Zenkin et al.   APPLIED PHYSICS LETTERS

Diffractometric method for determining the degree of crystallinity of materials

(2016) D. G. Chukhchin et al.   CRYSTALLOGRAPHY REPORTS

Microstructure, wettability, optical and electrical properties of HfO 2 thin films: Effect of oxygen partial pressure

(2016) J. Gao et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Hydrophilic/hydrophobic surface of Al 2 O 3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)

(2016) Li-Chun Wang et al.   SURFACE & COATINGS TECHNOLOGY

Role of surface oxygen-to-metal ratio on the wettability of rare-earth oxides

(2015) Sami Khan et al.   APPLIED PHYSICS LETTERS

Al2O3 coating grown on Nafion membranes by atomic layer deposition

(2015) Outi Toikkanen et al.   JOURNAL OF MEMBRANE SCIENCE

Effects of substrate temperature on properties of HfO2, HfO2:Al and HfO2:W films

(2015) Su-Shia Lin et al.   SURFACE & COATINGS TECHNOLOGY

Effect of hydrocarbon adsorption on the wettability of rare earth oxide ceramics

(2014) Daniel J. Preston et al.   APPLIED PHYSICS LETTERS

Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition

(2014) Il-Kwon Oh et al.   CHEMISTRY OF MATERIALS

Hydrophobicity of Thin Films of Compounds of Low-Electronegativity Metals

(2014) Sergei Zenkin et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO2 films

(2013) Ravish K. Jain et al.   APPLIED SURFACE SCIENCE

Hydrophobicity of rare-earth oxide ceramics

(2013) Gisele Azimi et al.   NATURE MATERIALS

Influence of sputtering pressure on the structural, optical and hydrophobic properties of sputtered deposited HfO2 coatings

(2013) V. Dave et al.   THIN SOLID FILMS

Reply to “Comment on 'Growth Behavior, Lattice Expansion, Strain, and Surface Morphology of Nanocrystalline, Monoclinic HfO2 Thin Films'”

(2012) C. V. Ramana et al.   Journal of Physical Chemistry C

Effect of post-deposition annealing temperature on RF-sputtered HfO2 thin film for advanced CMOS technology

(2012) A.G. Khairnar et al.   SOLID STATE SCIENCES

The influence of mixed phases on optical properties of HfO2 thin films prepared by thermal oxidation

(2011) Yizhu Xie et al.   JOURNAL OF MATERIALS RESEARCH

Study of the effect of thermal annealing on high k hafnium oxide thin film structure and electrical properties of MOS and MIM devices

(2010) A. Srivastava et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Thermo-induced hydrophilicity of nano-TiO2 thin films prepared by RF magnetron sputtering

(2009) Fanming Meng et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS