Effects of substrate temperature on properties of HfO2, HfO2:Al and HfO2:W films

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Title
Effects of substrate temperature on properties of HfO2, HfO2:Al and HfO2:W films
Authors
Keywords
Film, Substrate temperature, Hydrophobicity, Hydrophilicity, Light transmission, Refractive index
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 271, Issue -, Pages 269-275
Publisher
Elsevier BV
Online
2014-10-30
DOI
10.1016/j.surfcoat.2014.10.057

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