Tuning microstructure and properties of MoNbTaWZr high entropy alloy films by adjusting the parameters in high power impulse magnetron sputtering

A new design rule for high entropy alloy diffusion barriers in Cu metallization

(2023) Gerorg C. Gruber et al.   Journal of Alloys and Compounds

Synthesis and structure of refractory high entropy alloy thin films based on the MoNbTaW system

(2022) Georg C. Gruber et al.   SURFACE & COATINGS TECHNOLOGY

Excellent diffusion barrier property of amorphous NbMoTaW medium entropy alloy thin films used in Cu/Si Connect System

(2022) K. Hu et al.   VACUUM

Synthesis of WTaMoNbZr refractory high-entropy alloy powder by plasma spheroidization process for additive manufacturing

(2022) Ming Xia et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Thermal stability of MoNbTaTiW, MoNbTaVW and CrMoNbTaW thin films deposited by high power impulse magnetron sputtering

(2022) Georg C. Gruber et al.   SURFACE & COATINGS TECHNOLOGY

Effect of alloying elements on the structure and mechanical properties of NbMoTaWX (X = Cr, V, Ti, Zr, and Hf) refractory high-entropy alloys

(2021) Haibo Liu et al.   AIP Advances

Enhanced diffusion barrier property of nanolayered NbMoTaW/TiVCr high entropy alloy for copper metallization

(2021) P.F. Li et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Metastable structures in magnetron sputtered W–Zr thin-film alloys

(2021) M. Červená et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Angular-dependent deposition of MoNbTaVW HEA thin films by three different physical vapor deposition methods

(2020) Ao Xia et al.   SURFACE & COATINGS TECHNOLOGY

Thermodynamic route for self-forming 1.5 nm V-Nb-Mo-Ta-W high-entropy alloy barrier layer: Roles of enthalpy and mixing entropy

(2020) Yu-Ting Hsiao et al.   ACTA MATERIALIA

Thermal Stability of MoNbTaVW High Entropy Alloy Thin Films

(2020) Ao Xia et al.   Coatings

Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films

(2020) Ao Xia et al.   JOURNAL OF ALLOYS AND COMPOUNDS

High temperature electrical properties and oxidation resistance of V-Nb-Mo-Ta-W high entropy alloy thin films

(2019) Yen-Yu Chen et al.   SURFACE & COATINGS TECHNOLOGY

The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties

(2019) Martin Rausch et al.   SURFACE & COATINGS TECHNOLOGY

Microstructures and mechanical properties of Ti x NbMoTaW refractory high-entropy alloys

(2018) Z.D. Han et al.   MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING

Effect of Ti additions on mechanical properties of NbMoTaW and VNbMoTaW refractory high entropy alloys

(2017) Z.D. Han et al.   INTERMETALLICS

The electro-mechanical behavior of sputter-deposited Mo thin films on flexible substrates

(2016) Tanja Jörg et al.   THIN SOLID FILMS

Ionization of sputtered Ti, Al, and C coupled with plasma characterization in HiPIMS

(2015) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates

(2015) Christian Saringer et al.   SURFACE & COATINGS TECHNOLOGY

Atom insertion into grain boundaries and stress generation in physically vapor deposited films

(2013) D. Magnfält et al.   APPLIED PHYSICS LETTERS

High power impulse magnetron sputtering discharge

(2012) J. T. Gudmundsson et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

(2012) Chunqing Huo et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Mechanical properties of Nb25Mo25Ta25W25 and V20Nb20Mo20Ta20W20 refractory high entropy alloys

(2011) O.N. Senkov et al.   INTERMETALLICS

Refractory high-entropy alloys

(2010) O.N. Senkov et al.   INTERMETALLICS

On the film density using high power impulse magnetron sputtering

(2010) Mattias Samuelsson et al.   SURFACE & COATINGS TECHNOLOGY