Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

Published 2012 View Full Article

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Title
Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 21, Issue 4, Pages 045004
Publisher
IOP Publishing
Online
2012-06-15
DOI
10.1088/0963-0252/21/4/045004

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