Enhanced diffusion barrier property of nanolayered NbMoTaW/TiVCr high entropy alloy for copper metallization
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Title
Enhanced diffusion barrier property of nanolayered NbMoTaW/TiVCr high entropy alloy for copper metallization
Authors
Keywords
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Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 895, Issue -, Pages 162574
Publisher
Elsevier BV
Online
2021-11-04
DOI
10.1016/j.jallcom.2021.162574
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