Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates

Title
Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates
Authors
Keywords
Curvature method, Hard coatings, Plastic substrate deformation, Residual stress, Biaxial stress–temperature measurement
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 274, Issue -, Pages 68-75
Publisher
Elsevier BV
Online
2015-04-26
DOI
10.1016/j.surfcoat.2015.04.038

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