The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties

Published 2019 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 381, Issue -, Pages 125174
Publisher
Elsevier BV
Online
2019-11-19
DOI
10.1016/j.surfcoat.2019.125174

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.