Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia–Zirconia Alloys
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Title
Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia–Zirconia Alloys
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 14, Issue 47, Pages 53057-53064
Publisher
American Chemical Society (ACS)
Online
2022-11-17
DOI
10.1021/acsami.2c15047
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