Ferroelectric Hafnium Zirconium Oxide Compatible With Back-End-of-Line Process

Published 2021 View Full Article

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Title
Ferroelectric Hafnium Zirconium Oxide Compatible With Back-End-of-Line Process
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 68, Issue 7, Pages 3176-3180
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-04-28
DOI
10.1109/ted.2021.3072610

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