Anisotropic Stresses in GaN(11‒20) Layers on an r-Al2O3 Substrate during Hydride Vapor Phase Epitaxy

Title
Anisotropic Stresses in GaN(11‒20) Layers on an r-Al2O3 Substrate during Hydride Vapor Phase Epitaxy
Authors
Keywords
-
Journal
SEMICONDUCTORS
Volume -, Issue -, Pages -
Publisher
Pleiades Publishing Ltd
Online
2022-05-18
DOI
10.1134/s106378262202004x

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