Plastic Relaxation of Stressed Semipolar AlN($$10\bar {1}1$$) Layer Synthesized on a Nanopatterned Si(100) Substrate

Title
Plastic Relaxation of Stressed Semipolar AlN($$10\bar {1}1$$) Layer Synthesized on a Nanopatterned Si(100) Substrate
Authors
Keywords
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Journal
TECHNICAL PHYSICS
Volume 65, Issue 12, Pages 2031-2034
Publisher
Pleiades Publishing Ltd
Online
2020-12-11
DOI
10.1134/s1063784220120051

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