Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD
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Title
Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD
Authors
Keywords
Diamond-like carbon (DLC), Nanocrystalline diamond (NCD), CVD synthesis, Microwave plasma, Raman spectroscopy, Electron microscopy
Journal
APPLIED SURFACE SCIENCE
Volume 579, Issue -, Pages 152132
Publisher
Elsevier BV
Online
2021-12-09
DOI
10.1016/j.apsusc.2021.152132
References
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