Further improvements of nano-diamond structures on unheated substrates by optimization of parameters with secondary plasma in MW-PECVD

Published 2015 View Full Article

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Title
Further improvements of nano-diamond structures on unheated substrates by optimization of parameters with secondary plasma in MW-PECVD
Authors
Keywords
Nano-diamonds, Thin film, MWCVD, Secondary plasma, Micro-Raman
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 272, Issue -, Pages 357-365
Publisher
Elsevier BV
Online
2015-04-06
DOI
10.1016/j.surfcoat.2015.03.042

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