Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD
出版年份 2021 全文链接
标题
Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD
作者
关键词
Diamond-like carbon (DLC), Nanocrystalline diamond (NCD), CVD synthesis, Microwave plasma, Raman spectroscopy, Electron microscopy
出版物
APPLIED SURFACE SCIENCE
Volume 579, Issue -, Pages 152132
出版商
Elsevier BV
发表日期
2021-12-09
DOI
10.1016/j.apsusc.2021.152132
参考文献
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