Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies
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Title
Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies
Authors
Keywords
-
Journal
Journal of Materials Science
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2021-01-26
DOI
10.1007/s10853-020-05699-9
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Note: Only part of the references are listed.- Synthesis and characterization of microcrystalline diamond to ultrananocrystalline diamond films via Hot Filament Chemical Vapor Deposition for scaling to large area applications
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- (2008) Yuan Xie et al. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
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