Journal
SURFACE & COATINGS TECHNOLOGY
Volume 350, Issue -, Pages 863-867Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2018.04.016
Keywords
Photoemission-assisted plasma; Diamond-like carbon; Plasma enhanced CVD; X-ray photoelectron spectroscopy; Raman spectroscopy
Funding
- Japan Society for the Promotion of Science (JSPS) KAKENHI Grant [JP16K14124]
- Dynamic Alliance for Open Innovation Bridging Human, Environment and Materials from the Ministry of Education, Culture, Sports, Science and Technology of Japan (MEXT)
- Grants-in-Aid for Scientific Research [16K14124] Funding Source: KAKEN
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In this study, we tried to decrease the hydrogen content in diamond-like carbon (DLC) grown by photoemission-assisted plasma enhanced chemical vapor deposition (PA-PECVD) using Ar/CH4 mixed with CO2. When the CO2 flux was changed from 0 to 10 sccm with the Ar and CH4 fluxes maintained at 50 and 10 sccm, respectively, the growth rate decreased from 11 to 3 mu m/h. Secondary mass spectroscopy measurements confirmed that the amount of O mixed into the DLC was increased through incorporation of CO2 into feed gas flow. The 0 concentration in the DLC was quantitatively evaluated by X-ray photoelectron spectroscopy (XPS) to be 0.6 atomic % at a CO2 flow ratio of 14%. Raman spectroscopy and XPS revealed that the amount of H trapped in the DLC decreased as the CO2 flow ratio was increased and the sp(3)/sp(2) ratio remained almost unchanged. These results were interpreted by a model involving 0 radicals acting on the DLC surface associated with CO/CO2 and H2O, resulting in a decrease of the growth rate and H content. A portion of the O radicals also became incorporated into the DLC as C-O-C bonds.
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