Atomic Layer Deposition of Iron, Cobalt, and Nickel Chalcogenides: Progress and Outlook

Title
Atomic Layer Deposition of Iron, Cobalt, and Nickel Chalcogenides: Progress and Outlook
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 33, Issue 16, Pages 6251-6268
Publisher
American Chemical Society (ACS)
Online
2021-06-21
DOI
10.1021/acs.chemmater.1c01507

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