Atomic Layer Deposition of Nickel Carbide from a Nickel Amidinate Precursor and Hydrogen Plasma

Title
Atomic Layer Deposition of Nickel Carbide from a Nickel Amidinate Precursor and Hydrogen Plasma
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 10, Issue 9, Pages 8384-8390
Publisher
American Chemical Society (ACS)
Online
2018-02-15
DOI
10.1021/acsami.8b00388

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