From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity

Published 2018 View Full Article

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Title
From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 31, Issue 1, Pages 2-12
Publisher
American Chemical Society (ACS)
Online
2018-12-19
DOI
10.1021/acs.chemmater.8b03454

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