Scale-up and optimization of HfO 2 -ZrO 2 solid solution thin films for the electrostatic supercapacitors

Published 2017 View Full Article

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Title
Scale-up and optimization of HfO 2 -ZrO 2 solid solution thin films for the electrostatic supercapacitors
Authors
Keywords
Energy storage, Electrostatic supercapacitor, (Hf,Zr)O, 2, Ferroelectricity, Atomic layer deposition
Journal
Nano Energy
Volume 39, Issue -, Pages 390-399
Publisher
Elsevier BV
Online
2017-07-15
DOI
10.1016/j.nanoen.2017.07.017

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