Deposition and mechanical properties of δ-TaNx films with different stoichiometry by DC magnetron sputtering
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Title
Deposition and mechanical properties of δ-TaNx films with different stoichiometry by DC magnetron sputtering
Authors
Keywords
TaN, Magnetron sputtering, Hardness, Toughness, Wear resistance
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 404, Issue -, Pages 126452
Publisher
Elsevier BV
Online
2020-09-30
DOI
10.1016/j.surfcoat.2020.126452
References
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