Microstructure, residual stress, and fracture of sputtered TiN films

Published 2013 View Full Article

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Title
Microstructure, residual stress, and fracture of sputtered TiN films
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 224, Issue -, Pages 120-125
Publisher
Elsevier BV
Online
2013-03-21
DOI
10.1016/j.surfcoat.2013.03.009

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