Structure, phase evolution, and mechanical properties of DC, pulsed DC, and high power impulse magnetron sputtered Ta–N films

Title
Structure, phase evolution, and mechanical properties of DC, pulsed DC, and high power impulse magnetron sputtered Ta–N films
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 347, Issue -, Pages 304-312
Publisher
Elsevier BV
Online
2018-05-04
DOI
10.1016/j.surfcoat.2018.05.003

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