Magnetron sputter deposited tantalum and tantalum nitride thin films: An analysis of phase, hardness and composition

Published 2013 View Full Article

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Title
Magnetron sputter deposited tantalum and tantalum nitride thin films: An analysis of phase, hardness and composition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 548, Issue -, Pages 157-161
Publisher
Elsevier BV
Online
2013-09-24
DOI
10.1016/j.tsf.2013.09.055

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