Deposition and mechanical properties of δ-TaNx films with different stoichiometry by DC magnetron sputtering
出版年份 2020 全文链接
标题
Deposition and mechanical properties of δ-TaNx films with different stoichiometry by DC magnetron sputtering
作者
关键词
TaN, Magnetron sputtering, Hardness, Toughness, Wear resistance
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 404, Issue -, Pages 126452
出版商
Elsevier BV
发表日期
2020-09-30
DOI
10.1016/j.surfcoat.2020.126452
参考文献
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