CrN thin films deposited by HiPIMS in DOMS mode

Published 2016 View Full Article

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Title
CrN thin films deposited by HiPIMS in DOMS mode
Authors
Keywords
CrN films, DOMS, Film growth, Mechanical properties
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 291, Issue -, Pages 365-375
Publisher
Elsevier BV
Online
2016-03-05
DOI
10.1016/j.surfcoat.2016.02.064

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