Large influence of vacancies on the elastic constants of cubic epitaxial tantalum nitride layers grown by reactive magnetron sputtering

Published 2019 View Full Article

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Title
Large influence of vacancies on the elastic constants of cubic epitaxial tantalum nitride layers grown by reactive magnetron sputtering
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 184, Issue -, Pages 254-266
Publisher
Elsevier BV
Online
2019-11-25
DOI
10.1016/j.actamat.2019.11.041

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