Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

(2019) Min Cui et al.   Micromachines

A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam

(2019) Qiang Xu et al.   Micromachines

Experimental evaluation of resonant frequencies with associated mode shapes and power analysis of thermally actuated vibratory microgyroscope

(2018) Rana I. Shakoor et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Numerical simulation and modelling of a novel MEMS capacitive accelerometer based microphone for fully implantable hearing aid

(2018) Apoorva Dwivedi et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

(2018) Muhammad Saqib et al.   Micromachines

Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

(2018) Jia Jia et al.   Micromachines

Design and FEM simulation for a novel resonant silicon MEMS gyroscope with temperature compensation function

(2017) Zhanshe Guo et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity

(2017) G.Q. Wu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping

(2017) Minh Nguyen et al.   Micromachines

Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer

(2016) Payal Verma et al.   Journal of Micro-Nanolithography MEMS and MOEMS

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

(2015) Chunhua He et al.   IEEE SENSORS JOURNAL

In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

(2015) Stefano Dellea et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Effect of creep in RF MEMS static and dynamic behavior

(2015) Aurelio Somà et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

New design architecture of a 3-DOF vibratory gyroscope with robust drive operation mode and implementation

(2014) Payal Verma et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Design and modeling of a new robust multi-mass coupled-resonator family with dynamic motion amplification

(2012) M. A. Erismis   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances

(2011) M. Mubasher Saleem et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope

(2011) Kashif Riaz et al.   SENSORS AND ACTUATORS A-PHYSICAL

Review on the Modeling of Electrostatic MEMS

(2010) Wan-Chun Chuang et al.   SENSORS

A wide-bandwidth and high-sensitivity robust microgyroscope

(2009) Korhan Sahin et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

(2009) L Mol et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Effects of Operational Frequency Scaling in Multi-Degree of Freedom MEMS Gyroscopes

(2008) Adam R. Schofield et al.   IEEE SENSORS JOURNAL

Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air

(2008) Alexander A. Trusov et al.   SENSORS AND ACTUATORS A-PHYSICAL