Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope
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Title
Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope
Authors
Keywords
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Journal
Micromachines
Volume 9, Issue 11, Pages 577
Publisher
MDPI AG
Online
2018-11-07
DOI
10.3390/mi9110577
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