Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope
出版年份 2020 全文链接
标题
Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope
作者
关键词
-
出版物
Micromachines
Volume 11, Issue 9, Pages 862
出版商
MDPI AG
发表日期
2020-09-17
DOI
10.3390/mi11090862
参考文献
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