Design and FEM simulation for a novel resonant silicon MEMS gyroscope with temperature compensation function

Published 2017 View Full Article

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Title
Design and FEM simulation for a novel resonant silicon MEMS gyroscope with temperature compensation function
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 24, Issue 3, Pages 1453-1459
Publisher
Springer Nature
Online
2017-08-10
DOI
10.1007/s00542-017-3524-4
References
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