Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer

Published 2016 View Full Article

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Title
Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 15, Issue 3, Pages 035001
Publisher
SPIE-Intl Soc Optical Eng
Online
2016-07-21
DOI
10.1117/1.jmm.15.3.035001

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