Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope

Title
Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 172, Issue 2, Pages 523-532
Publisher
Elsevier BV
Online
2011-10-02
DOI
10.1016/j.sna.2011.09.032

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