Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Title
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 074021
Publisher
IOP Publishing
Online
2009-07-01
DOI
10.1088/0960-1317/19/7/074021

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