Experimental evaluation of resonant frequencies with associated mode shapes and power analysis of thermally actuated vibratory microgyroscope

Observation and analysis of the quality factor variation behavior in a monolithic fused silica cylindrical resonator

(2017) Yao Pan et al.   SENSORS AND ACTUATORS A-PHYSICAL

A novel triangular-electrode based capacitive sensing method for MEMS resonant devices

(2016) Wei Ma et al.   SENSORS AND ACTUATORS A-PHYSICAL

Gyroscope sensing and self-calibration architecture based on signal phase shift

(2016) Giorgio Casinovi et al.   SENSORS AND ACTUATORS A-PHYSICAL

A review on coupled MEMS resonators for sensing applications utilizing mode localization

(2016) Chun Zhao et al.   SENSORS AND ACTUATORS A-PHYSICAL

Experimental analysis and characterization of electrostatic-drive tri-axis micro-gyroscope

(2010) Nan-Chyuan Tsai et al.   SENSORS AND ACTUATORS A-PHYSICAL

Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

(2010) Alexander A. Trusov et al.   SENSORS AND ACTUATORS A-PHYSICAL

Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications

(2009) Cenk Acar et al.   IEEE SENSORS JOURNAL

A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability

(2008) M.F. Zaman et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS