High electron density β-(Al0.17Ga0.83)2O3/Ga2O3 modulation doping using an ultra-thin (1 nm) spacer layer
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Title
High electron density β-(Al0.17Ga0.83)2O3/Ga2O3 modulation doping using an ultra-thin (1 nm) spacer layer
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 127, Issue 21, Pages 215706
Publisher
AIP Publishing
Online
2020-06-04
DOI
10.1063/5.0005531
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