Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review

Title
Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review
Authors
Keywords
-
Journal
Materials Research Express
Volume 6, Issue 12, Pages 122001
Publisher
IOP Publishing
Online
2019-10-31
DOI
10.1088/2053-1591/ab52cd

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