Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review
出版年份 2019 全文链接
标题
Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review
作者
关键词
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出版物
Materials Research Express
Volume 6, Issue 12, Pages 122001
出版商
IOP Publishing
发表日期
2019-10-31
DOI
10.1088/2053-1591/ab52cd
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