Plasmonic Lithography: Recent Progress

Plasmonic nanoparticle lithography: Fast resist-free laser technique for large-scale sub-50 nm hole array fabrication

(2018) Zhenying Pan et al.   APPLIED PHYSICS LETTERS

Plasmonic direct writing lithography with a macroscopical contact probe

(2018) Yuerong Huang et al.   APPLIED SURFACE SCIENCE

Mask Materials and Designs for Extreme Ultra Violet Lithography

(2018) Jung Sik Kim et al.   Electronic Materials Letters

Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons

(2018) Hongchao Liu et al.   Optical Materials Express

Subwavelength Nanostructuring of Gold Films by Apertureless Scanning Probe Lithography Assisted by a Femtosecond Fiber Laser Oscillator

(2018) Ignacio Falcón Casas et al.   Nanomaterials

3 Directions for Moore's Law: The last few months have sent mixed signals about where chips are headed

(2018) Samuel K. Moore   IEEE SPECTRUM

Herpin effective media resonant underlayers and resonant overlayer designs for ultra-high NA interference lithography

(2017) Levi Bourke et al.   JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION

Optical proximity correction (OPC) in near-field lithography with pixel-based field sectioning time modulation

(2017) Seonghyeon Oh et al.   NANOTECHNOLOGY

Pushing the plasmonic imaging nanolithography to nano-manufacturing

(2017) Ping Gao et al.   OPTICS COMMUNICATIONS

A novel optical lithography implement utilizing third harmonic generation via metallic tip enhanced near field

(2017) Hui Zhang et al.   OPTICS COMMUNICATIONS

Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons

(2017) Hongchao Liu et al.   OPTICS EXPRESS

Proximity correction and resolution enhancement of plasmonic lens lithography far beyond the near field diffraction limit

(2017) Yunfei Luo et al.   RSC Advances

Nanoscale 2.5-dimensional surface patterning with plasmonic lithography

(2017) Howon Jung et al.   Scientific Reports

Characterization of three-dimensional field distribution of bowtie aperture using quasi-spherical waves and surface plasmon polaritons

(2017) Changhoon Park et al.   Scientific Reports

Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography

(2017) Liqin Liu et al.   Advanced Optical Materials

Comparison of technologies for nano device prototyping with a special focus on ion beams: A review

(2017) L. Bruchhaus et al.   Applied Physics Reviews

Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology

(2017) Yueqiang Hu et al.   Friction

Large-Area High Aspect Ratio Plasmonic Interference Lithography Utilizing a Single High-k Mode

(2016) Xi Chen et al.   ACS Nano

Nanomanufacturing: A Perspective

(2016) J. Alexander Liddle et al.   ACS Nano

Near-fild optical lithography in application to plasmonic antennas characterization

(2016) A. V. Shelaev et al.   INSTRUMENTS AND EXPERIMENTAL TECHNIQUES

Calibration of exposure dose for nanoscale plasmonic lithography with microsized far-field spot patterns

(2016) Dandan Han et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

X-ray lithography: Some history, current status and future prospects

(2016) Juan R. Maldonado et al.   MICROELECTRONIC ENGINEERING

16 nm-resolution lithography using ultra-small-gap bowtie apertures

(2016) Yang Chen et al.   NANOTECHNOLOGY

Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review

(2016) Changtao Wang et al.   Micromachines

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

(2016) Lothar Bischoff et al.   Applied Physics Reviews

Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens

(2015) Ping Gao et al.   APPLIED PHYSICS LETTERS

Solid immersion optical lithography: index matching and resonant reflectors for large exposure field, high-aspect ratio imaging in the ultrahigh-numerical aperture regime

(2015) Sam Lowrey et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Plasmonic lithography for fabricating nanoimprint masters with multi-scale patterns

(2015) Howon Jung et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Nanofabrication by electron beam lithography and its applications: A review

(2015) Yifang Chen   MICROELECTRONIC ENGINEERING

Fabrication of anisotropically arrayed nano-slots metasurfaces using reflective plasmonic lithography

(2015) Jun Luo et al.   Nanoscale

Fabrication of bowtie aperture antennas for producing sub-20 nm optical spots

(2015) Yang Chen et al.   OPTICS EXPRESS

Forming Sub-32-nm High-Aspect Plasmonic Spot via Bowtie Aperture Combined with Metal-Insulator-Metal Scheme

(2015) Yaohui Wang et al.   Plasmonics

High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field

(2015) X. Wen et al.   Scientific Reports

Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography

(2015) Gaofeng Liang et al.   Advanced Optical Materials

Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays

(2015) Masayoshi Esashi et al.   Microsystems & Nanoengineering

Sub-10 nm writing: focused electron beam-induced deposition in perspective

(2014) W. F. van Dorp   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Pushing the resolution of photolithography down to 15nm by surface plasmon interference

(2014) Jianjie Dong et al.   Scientific Reports

Surface plasmon resonance sensing of nucleic acids: A review

(2013) Hana Šípová et al.   ANALYTICA CHIMICA ACTA

Progress and issues in e-beam and other top down nanolithography

(2013) Donald M. Tennant   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process

(2013) Liang Fang et al.   MICROELECTRONIC ENGINEERING

Deep sub-wavelength imaging lithography by a reflective plasmonic slab

(2013) Changtao Wang et al.   OPTICS EXPRESS

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

(2013) Prateek Mehrotra et al.   OPTICS EXPRESS

High Contrast Superlens Lithography Engineered by Loss Reduction

(2012) Hong Liu et al.   ADVANCED FUNCTIONAL MATERIALS

Surface plasmon resonance based biosensor technique: A review

(2012) Xiaowei Guo   Journal of Biophotonics

Gain-assisted Hybrid-superlens Hyperlens for Nano Imaging

(2012) Yao Ting Wang et al.   OPTICS EXPRESS

Engineering metallic nanostructures for plasmonics and nanophotonics

(2012) Nathan C Lindquist et al.   REPORTS ON PROGRESS IN PHYSICS

Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography

(2011) Prateek Mehrotra   Journal of Micro-Nanolithography MEMS and MOEMS

Accurate near-field lithography modeling and quantitative mapping of the near-field distribution of a plasmonic nanoaperture in a metal

(2011) Yongwoo Kim et al.   OPTICS EXPRESS

Increased process latitude in absorbance-modulated lithography via a plasmonic reflector

(2011) Charles W. Holzwarth et al.   OPTICS EXPRESS

Plasmonic Nanolithography: A Review

(2011) Zhihua Xie et al.   Plasmonics

Design of a contact probe with high positioning accuracy for plasmonic lithography

(2011) Jinhee Jang et al.   SCANNING

Microfabrication and Applications of Opto-Microfluidic Sensors

(2011) Daiying Zhang et al.   SENSORS

Maskless Plasmonic Lithography at 22 nm Resolution

(2011) Liang Pan et al.   Scientific Reports

E-beam lithography for micro-/nanofabrication

(2010) Matteo Altissimo   Biomicrofluidics

Parallel Scanning Near-Field Photolithography: The Snomipede

(2010) Ehtsham ul Haq et al.   NANO LETTERS

Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

(2009) Se Hyun Ahn et al.   ACS Nano

Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns

(2009) T. Xu et al.   APPLIED PHYSICS B-LASERS AND OPTICS

Simulations of surface roughness effects in planar superlenses

(2009) Mikkel Schøler et al.  

Resonant surface roughness interactions in planar superlenses

(2009) Mikkel Schøler et al.   MICROELECTRONIC ENGINEERING

Plasmonic nano lithography
 with a high scan speed contact probe

(2009) Yongwoo Kim et al.   OPTICS EXPRESS

Breaking the feature sizes down to sub-22 nm by plasmonic interference lithography using dielectric-metal multilayer

(2009) Xuefeng Yang et al.   OPTICS EXPRESS

Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography

(2009) Vadakke Matham Murukeshan et al.   OPTICS LETTERS

Image fidelity for single-layer and multi-layer silver superlenses

(2008) Ciaran P. Moore et al.   JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION

Flying plasmonic lens in the near field for high-speed nanolithography

(2008) Werayut Srituravanich et al.   Nature Nanotechnology