Progress and issues in e-beam and other top down nanolithography

Lithography, metrology and nanomanufacturing

(2011) J. Alexander Liddle et al.   Nanoscale

Comparison of EB Exposure Characteristics between HSQ and Calix Arene of High Resolution Negative Resist

(2010) S. Omoto et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography

(2010) Joan Vila-Comamala et al.   NANOTECHNOLOGY

Atomic precision lithography on Si

(2009) J. N. Randall et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

(2009) Sung-Wook Nam et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

(2009) Joel K. W. Yang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Atomic-Scale Templates Patterned by Ultrahigh Vacuum Scanning Tunneling Microscopy on Silicon

(2008) Michael A. Walsh et al.   Annual Review of Physical Chemistry

Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

(2008) M. Gnan et al.   ELECTRONICS LETTERS

Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer

(2008) Yeon Sik Jung et al.   NANO LETTERS

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE