Pushing the resolution of photolithography down to 15nm by surface plasmon interference
Published 2014 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Pushing the resolution of photolithography down to 15nm by surface plasmon interference
Authors
Keywords
-
Journal
Scientific Reports
Volume 4, Issue 1, Pages -
Publisher
Springer Nature
Online
2014-07-08
DOI
10.1038/srep05618
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Enhanced deep ultraviolet inverse polarization transmission through hybrid Al-SiO2 gratings
- (2013) G. Kang et al. APPLIED PHYSICS LETTERS
- Image distance shift effect of the metal superlens and its applications to photolithography
- (2013) Jianjie Dong et al. EPL
- Ordered Ag/Si Nanowires Array: Wide-Range Surface-Enhanced Raman Spectroscopy for Reproducible Biomolecule Detection
- (2013) Jian-An Huang et al. NANO LETTERS
- Au Nanocrystal Array/Silicon Nanoantennas as Wavelength-Selective Photoswitches
- (2013) Yu-Kai Lin et al. NANO LETTERS
- Engineering Plasmon-Enhanced Au Light Emission with Planar Arrays of Nanoparticles
- (2013) Gary F. Walsh et al. NANO LETTERS
- Ultrafast Strong-Field Photoemission from Plasmonic Nanoparticles
- (2013) Péter Dombi et al. NANO LETTERS
- Deep sub-wavelength imaging lithography by a reflective plasmonic slab
- (2013) Changtao Wang et al. OPTICS EXPRESS
- A Super Lens System for Demagnification Imaging Beyond the Diffraction Limit
- (2013) Jianjie Dong et al. Plasmonics
- Achromatic polarization splitting effect of metallic gratings with sub-50 nm wide slits
- (2012) Guoguo Kang et al. APPLIED PHYSICS LETTERS
- High Aspect Subdiffraction-Limit Photolithography via a Silver Superlens
- (2012) Hong Liu et al. NANO LETTERS
- Surface plasmon interference lithography with a surface relief metal grating
- (2012) Jianjie Dong et al. OPTICS COMMUNICATIONS
- Inverse polarizing effect of subwavelength metallic gratings in deep ultraviolet band
- (2011) Guo G. Kang et al. APPLIED PHYSICS LETTERS
- Maskless Plasmonic Lithography at 22 nm Resolution
- (2011) Liang Pan et al. Scientific Reports
- A smooth optical superlens
- (2010) Pratik Chaturvedi et al. APPLIED PHYSICS LETTERS
- A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique
- (2010) Mingyang He et al. OPTICS EXPRESS
- A superlens for the deep ultraviolet
- (2009) Alina Schilling et al. APPLIED PHYSICS LETTERS
- Large-area maskless surface plasmon interference for one- and two-dimensional periodic nanoscale feature patterning
- (2009) K. V. Sreekanth et al. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
- Breaking the feature sizes down to sub-22 nm by plasmonic interference lithography using dielectric-metal multilayer
- (2009) Xuefeng Yang et al. OPTICS EXPRESS
- Plasmonic interference nanolithography with a double-layer planar silver lens structure
- (2009) Beibei Zeng et al. OPTICS EXPRESS
- A planar layer configuration for surface plasmon interference nanoscale lithography
- (2008) K. V. Sreekanth et al. APPLIED PHYSICS LETTERS
- Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp
- (2008) Dongbing Shao et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Flying plasmonic lens in the near field for high-speed nanolithography
- (2008) Werayut Srituravanich et al. Nature Nanotechnology
- Extremely Narrow Plasmon Resonances Based on Diffraction Coupling of Localized Plasmons in Arrays of Metallic Nanoparticles
- (2008) V. G. Kravets et al. PHYSICAL REVIEW LETTERS
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchAdd your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload Now