Plasmonic lithography for fabricating nanoimprint masters with multi-scale patterns

Title
Plasmonic lithography for fabricating nanoimprint masters with multi-scale patterns
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 5, Pages 055004
Publisher
IOP Publishing
Online
2015-04-01
DOI
10.1088/0960-1317/25/5/055004

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