Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens

Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination

(2014) Wei Zhang et al.   Plasmonics

Deep sub-wavelength imaging lithography by a reflective plasmonic slab

(2013) Changtao Wang et al.   OPTICS EXPRESS

Negative and Positive Impact of Roughness and Loss on Subwavelength Imaging for Superlens Structures

(2013) Zhen Guo et al.   Plasmonics

Ultrasmooth Silver Thin Film on PEDOT:PSS Nucleation Layer for Extended Surface Plasmon Propagation

(2012) L. Ke et al.   ACS Applied Materials & Interfaces

High Contrast Superlens Lithography Engineered by Loss Reduction

(2012) Hong Liu et al.   ADVANCED FUNCTIONAL MATERIALS

Resolution Limit in Plasmonic Lithography for Practical Applications beyond 2x-nm Half Pitch

(2012) Seok Kim et al.   ADVANCED MATERIALS

A smooth optical superlens

(2010) Pratik Chaturvedi et al.   APPLIED PHYSICS LETTERS

Lithography gets extreme

(2009) Christian Wagner et al.   Nature Photonics

Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer

(2008) Logeeswaran VJ et al.   NANO LETTERS

Flying plasmonic lens in the near field for high-speed nanolithography

(2008) Werayut Srituravanich et al.   Nature Nanotechnology

Subwavelength imaging with anisotropic structure comprising alternately layered metal and dielectric films

(2008) Changtao Wang et al.   OPTICS EXPRESS